S17 (AOI) chip and lens sorting and inspection robot
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M18 multi-chip module bonding robot
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The highest bonding accuracy is ±3 microns, the highest bonding angle is ±0.1°, the pick and bonding force is controllable, compatible with Tray&Wafer, tray & PCB automatic feeding and discharging device, and chip bottom vision device
EX20 high precision eutectic bonding robot
The highest bonding accuracy is ±1.5 microns, the highest bonding angle is ±0.05°, reliable temperature rise and fall control, the temperature rise and fall rate can reach 100℃/s, compatible with multi-size Tary loading and unloading, chip bottom vision device
WB20 Ultrasonic Wire Bonding Machine
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A18 intelligent appearance inspection equipment
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EX20 high precision eutectic bonding robot
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产品参数
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We could not find any corresponding parameters, please add them to the properties table
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Maximum bonding accuracy ±1.5um More precise chip bonding
Sub-pixel chip recognition rate
Multi-function feeding, dual soldering head bonding
Precise force control\height measurement
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Reliable temperature rise control Healthier production control, compatible with MES interface\ESD protection
Mapping count\retrieve\classification
Chip inspection for defective products
User-friendly interface\Comprehensive wafer map library
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More flexible adaptation to product switching Suitable for: 5G communication chip COC\high power laser chip\
laser and other chips eutectic die bonding
Military industry: metal shell multi-chip eutectic die bonding
Gold-tin bonding of gallium arsenide and gallium nitride die
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Product Parameter
■ Optional
| Model | EX20 | EX20 Plus | EX20 Pro |
| Placement accuracy | ±5μm@3σ | ±3μm@3σ | |
| Angle | ≤0.1° | ≤0.05° | |
| Wafer table (wafer) | 6 inch wafer | 6 inch wafer | |
| Working desk size Adapt to the size of the material tray (effective working stroke) |
Tray loading 120*120（4*2 inch） |
Tray loading 120*120（4*2 inch） |
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| Chip size | 0.15~5mm | 0.15~5mm | |
| Size, weigh | 1700*1400*2100 2500KG |
1700*1400*2100 2500KG |
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| Picking force control | Automatic voice coil control Controllable range：10～300g |
Automatic voice coil control Controllable range：10～300g |
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| Eutectic bonding | Programmable ramp rates up to 450ºC | Programmable ramp rates up to 450ºC | |
| Detection function | Chip dot recognition, chip defect similarity recognition | Chip dot recognition, chip defect similarity recognition | |
| Health function | Deionization device, operating window light curtain | Deionization device, operating window light curtain | |
| Intelligent authority | Operator/engineer operation authority, Mipping map reading, generation (optional) | Operator/engineer operation authority, Mipping map reading, generation (optional) | |
| Optional combination: ：1、Wafer loading 2、Tray loading 3、Automatic suction nozzle change | |||
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Energy Intelligent Technology Wuxi Co.,Ltd
E-mail：market@eng-wx.com
Address: Building 8, Area C, Jinshan North Science and Technology Park, No.90 Huaian Road, Liangxi District, Wuxi City, Jiangsu Province, China
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